Resistance Modeling of Test Structures for Accurate Fault Detection in Backend Process Steps Using a Digital Tester
نویسندگان
چکیده
A methodology is presented to enable the usage of a digital tester for an accurate detection of open circuits as well as short circuits in test structures to control backend process steps. Therefore, a novel graph model will be introduced to calculate the resistance values of test structures containing defects. The paper gives a comprehensive description of the procedure to adjust the tester parameters to those test structures.
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